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Our Cleanroom robots blend precision, speed and cleanliness

The electronics and semiconductor industries have high requirements for precision, speed, and low particle emissions. To meet these needs, Stäubli offers a line of Cleanroom robotic arms specifically designed for highly sensitive applications. Our robots are capable of handling silicon wafers, wafer carriers, photomasks, and panels throughout the entire semiconductor production process with exceptional accuracy, high speed, and smooth movements.


The Stäubli Super Cleanroom (SCR) robots perfectly meet the challenges of photomask handlings for processes such as cleaning and inspection.

Wafer carrier

Handling, transport and storage of Wafer carrier (FOUP or cassette) in FABs could be perfectly handled with Stäubli robots thanks to their high precision and cleanliness.

Wafer and panel

Stäubli provides the utmost speed, flexibility, and reliability for handling wafers (individually or in batches) or panels in the intricate front-end processes of semiconductor manufacturing, including polishing, etching, lithography, cleaning, and more.

Our dedicated products

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