- Europe
- Americas
- Asia and Middle East
- Africa and Oceania
Stäubli Cleanroom robots meet ISO 14644-1 class 2 (SCR version) and class 4 (CR version) standards and feature a totally enclosed arm with a glossy polyurethane surface, capable of high dexterity. Compared to other wafer robots, the Stäubli SCR and CR robots offer greater flexibility, higher payload capacity, and extended reach, perfectly meeting the challenges of wafer/photomask/carrier/cassette handling. A compact arm footprint also helps to save precious space in dedicated machines.
| 6 axis robots | ||||
|---|---|---|---|---|
| Model |
|
|
|
|
| Degrees of freedom | 6 | 6 | 6 | 6 |
| Load capacity (kg) | 4.5 / 3.7 | 14 / 12 / 7 | 40 | 40 / 25 |
| Reach at wrist (mm) | 670 / 920 | 1000 / 1200 / 1450 | 1510 | 1710 / 2010 |
| Repeatability (mm) | ±0.02 | ±0.02 | ±0.015 | ±0.02/±0.03 |
| Cleanroom standard ISO 14644-1 | Class 2 (SCR version) - Class 4 (CR version) | Class 4 (CR version) | ||
Protection class (*wrist) | IP65 (*IP67) | |||
| Attachment methods | 360° mounting possibility | Floor or ceiling | ||
| Stäubli controller | CS9 | CS9 MP | ||
