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Our Cleanroom robots blend precision, speed and cleanliness

The electronics and semiconductor industries have high requirements for precision, speed, and low particle emissions. To meet these needs, Stäubli offers a line of Cleanroom robotic arms specifically designed for highly sensitive applications. Our robots are capable of handling silicon wafers, wafer carriers, photomasks, and panels throughout the entire semiconductor production process with exceptional accuracy, high speed, and smooth movements.


The Stäubli Super Cleanroom (SCR) robots perfectly meet the challenges of photomask handlings for processes such as cleaning and inspection.

Wafer carrier

Handling, transport and storage of Wafer carrier (FOUP or cassette) in FABs could be perfectly handled with Stäubli robots thanks to their high precision and cleanliness.

Wafer and panel

Stäubli provides the utmost speed, flexibility, and reliability for handling wafers (individually or in batches) or panels in the intricate front-end processes of semiconductor manufacturing, including polishing, etching, lithography, cleaning, and more.

Robotics Users Requirements


Compatible to ISO2 cleanroom avoiding any potential damage by thin particles from the robot.

Precision and smooth trajectory

To be handled with the best care.

Long-term reliability

Because the robot should always have the best performance after years of usage.

Low footprint

Because you need to make use of the small space to have the large throughput.

Our dedicated products

Member of SEMI


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