TX60L cleanroom at SÜESS MicroTec
Semiconductor and cleanroom Success story

Cleanroom robots entrusted with precious cargo

Customer benefits
  • Reliable prevention of wafer breakage
  • Precise robot handling in the μ range
  • Flexible system design
  • Short cycle times
  • High productivity
SÜSS MicroTec's high-precision Stäubli TX60L Cleanroom robot