Automated handling of wafers
Robots moving components from A to B may sound like a routine procedure. It is a very different matter, however, when they are handling silicon wafers in the back end area, since at this stage, a single disk can be worth several thousand euros. SÜSS MicroTec has opted for the high-precision Stäubli TX60L CR (Cleanroom) robot to ensure ultra-safe handling of this precious cargo.
Asia effectively has a stranglehold on the semiconductor market, yet the SÜSS MicroTec Group is able to compete on the same level where wafer processing is concerned. One of the companies in the group is SÜSS MicroTec Lithography GmbH which, as the name suggests, specializes in the use of lithography for the processing of wafers in the b