TX60L cleanroom at SÜESS MicroTec
Semiconductor and cleanroom Success story

Cleanroom robots entrusted with precious cargo

Customer benefits
  • Reliable prevention of wafer breakage
  • Precise robot handling in the μ range
  • Flexible system design
  • Short cycle times
  • High productivity
SÜSS MicroTec's high-precision Stäubli TX60L Cleanroom robot
All handling tasks within the plant are carried out by the high-precision Stäubli Cleanroom robot TX60L CR.

TASK

Automated handling of wafers

Robots moving components from A to B may sound like a routine procedure. It is a very different matter, however, when they are handling silicon wafers in the back end area, since at this stage, a single disk can be worth several thousand euros. SÜSS MicroTec has opted for the high-precision Stäubli TX60L CR (Cleanroom) robot to ensure ultra-safe handling of this precious cargo.

Asia effectively has a stranglehold on the semiconductor market, yet the SÜSS MicroTec Group is able to compete on the same level where wafer processing is concerned. One of the companies in the group is SÜSS MicroTec Lithography GmbH which, as the name suggests, specializes in the use of lithography for the processing of wafers in the b