TX60L cleanroom at SÜESS MicroTec
Semiconductor and cleanroom Success story

Cleanroom robots entrusted with precious cargo

Customer benefits
  • Reliable prevention of wafer breakage
  • Precise robot handling in the μ range
  • Flexible system design
  • Short cycle times
  • High productivity
SÜSS MicroTec's high-precision Stäubli TX60L Cleanroom robot
All handling tasks within the plant are carried out by the high-precision Stäubli Cleanroom robot TX60L CR.

TASK

Automated handling of wafers

Robots moving components from A to B may sound like a routine procedure. It is a very different matter, however, when they are handling silicon wafers in the back end area, since at this stage, a single disk can be worth s