Photomask processing

Handling a photomask is among the most crucial steps in semiconductor processing. This small yet valuable piece contains the blueprint for the circuit pattern to be printed on the wafer during photolithography. Accuracy is of utmost importance in this process.

For the extremely delicate tasks of applying the reticle/photomask, mounting the pellicle, cleaning and inspecting the photomask, Stäubli robots offer the lowest level of vibration, smooth trajectories, and high path accuracy. They also provide ISO class 2 compatibility for the highest level of cleanliness.