Wafer carrier handling, transport and storage

Handling wafer carriers, such as FOUP, SMIF and other types of open cassettes, is a delicate task due to the fragility and high value of the contents. Since front-end processing in FABs involves multiple steps, wafers need to be transferred quickly and safely from one process machine to the next. The carriers are also used for temporary wafer storage.

Systems integrated with Stäubli cleanroom robots, specifically designed for the strict requirements of cleanrooms, can ensure high speed and reliability in wafer carrier handling and storage. This enables higher throughput while minimizing particle emissions. Additionally, their compact footprint helps save space for fabrication equipment.