Wafer and panel processing

The Super Cleanroom (SCR) 6 axis robots are designed to meet the strict requirements of cleanrooms. They meet ISO 14644-1 class 2 or FED209E subclass 1 standards and feature a totally enclosed arm with a glossy polyurethane surface, capable of high dexterity. Compared to other wafer robots, the Stäubli SCR robots could offer a larger flexibility and higher payload and reach, perfectly meeting the challenges of wafer/photomask/carrier/cassette handling. A compact arm footprint also helps to save precious space in dedicated machines.