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Stäubli cleanroom solutions
Stäubli cleanroom robots are particularly applicable in electronics and semiconductor industries to perform precisely controlled applications, like gentle and smooth handling of all media in semiconductor process.
Features / Benefits
- ISO 14644-1 class 2/3 or FED209E subclass 1
- small footprint
- high dexterity
- gloss, polyurethane surface
- totally enclosed arm
Loading and unloading a carbon boat in photovoltaic industry.
The end effector design ensures a stress-free handling of the sensitive PV wafers.
RX60SCR mounted on a vertical track in a stocker system (un)loads 300 mm wafer in ISO 2/3 environment.
Vibration-free handling of a quartz-boat filled with 150 wafers. The ISO 4 robot moves the boat in front of a furnace.
Wafer and carrier handling in ISO 2/3 environment.
Using a robot increases throughput and enables the reduction of particles.